Basic features of MEMS gas sensors

Basic features of MEMS gas sensors
JXCTTime:2022-12-13

MEMS gas sensors

The MEMS gas sensors is fabricated by MEMS process on SI substrate. The gas-sensitive materials used are metal oxide semiconductor materials with low conductivity in clean air. When the detected gas exists in the ambient air, the conductivity of the sensor changes. The higher the concentration of the gas, the higher the conductivity of the sensor.

MEMS gas sensor
JXBS-3001 MEMS gas sensors can effectively carry out a variety of gas online monitoring. Product size is small, reaction speed, low power consumption, manufacturers direct sales, support customization. Manufacturers direct sales, support custom, more gas sensors, welcome to the clear communication consultation.

What is MEMS technology?

In the 1980s, MEMS technology was invented. This is a technology that uses a silicon-based semiconductor manufacturing process to build miniature mechanoelectronic systems. We first used Mems in the automotive and military industries. mems includes a mems sensor and a mems actuator. The devices manufactured by MEMS process have the characteristics of miniaturization and intelligentization. It can meet the requirements of low power consumption and high consistency in the process of collecting massive data of different dimensions by edge devices in the Internet of Things.

However, prior to the birth of 4G networks, the market demand for MEMS sensors was also limited due to the limited data transmission and carrying capacity of communication networks. Just as human fetuses have not yet developed neural networks, they develop their sensory organs slowly.  As a equipment manufacturer with many years of experience, the price is close to the people and supports customization.

The basic characteristics of MEMS gas sensors chip

MEMS gas sensor

1. We use it in a multidisciplinary field;
2. Multi-industry knowledge and technology;
3. Need non-standardized, highly customized production and processing technology;
4. It has very high requirements for the support of the product supply chain system.

MEMS sensor chips are essentially a collection of extremely small mechanical systems and integrated circuits manufactured on silicon wafers. MEMS gas sensor chip has very strong process characteristics. One of the reasons why the country requires a breakthrough in MEMS manufacturing process is that the 3D manufacturing process of integrated circuits is very different from that of 2D.